Graphene-mediated blister-based laser-induced forward transfer of thin and ultra-thin ZrO2

Blister-based laser-induced forward transfer (BB-LIFT) is a promising high precision and resolution printing technique for the fast, solvent- and mask-free transfer of functional layered materials onto micro-devices. It utilizes a protective metal (blister) layer sandwiched between the laser-transpa...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2024-10, Vol.130 (10), Article 743
Main Authors: Baloglu, Ahmet Burak, Kodu, Margus, Kozlova, Jekaterina, Kahro, Tauno, Jaaniso, Raivo
Format: Article
Language:English
Subjects:
Aluminum oxide
Blistering
Bonding strength
Characterization and Evaluation of Materials
Condensed Matter Physics
Gas sensors
Graphene
Lasers
Layered materials
Machines
Manufacturing
Metal oxides
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Substrates
Surfaces and Interfaces
Thin Films
Zirconium dioxide
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Summary:Blister-based laser-induced forward transfer (BB-LIFT) is a promising high precision and resolution printing technique for the fast, solvent- and mask-free transfer of functional layered materials onto micro-devices. It utilizes a protective metal (blister) layer sandwiched between the laser-transparent substrate and the material to be transferred. The metal layer absorbs the incident laser pulse, creating a rapidly expanding blister that propels the overlying material onto a target substrate. We show that BB-LIFT of thin and ultrathin (30 and 3 nm) ZrO 2 films is realized only with a “graphene release layer” applied between the Al blister layer and the ZrO 2 donor layer. Without such intercalation, ZrO 2 is inseparable from the blister layer due to the strong oxide bonding with aluminum oxides formed during the preparation. The ZrO 2 transfer was confirmed through high-resolution scanning electron microscopy and energy-dispersive X-ray spectroscopy, affirming the critical role of graphene as a release layer. The promotion of mechanically strong, flexible graphene as a release layer can be generalized in BB-LIFT applications if thin films of fragile, polycrystalline, or amorphous metal oxides must be printed for gas sensors, catalytic, or other applications.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-024-07909-6