Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3

In this paper, a high-frequency lamb wave resonator (LWR) with near zero temperature coefficient of frequency (TCF) is designed, fabricated, and measured. The reported resonator is of a bi-layer structure consisting of lithium niobate (LiNbO3 or LN) and silicon dioxide (SiO2), and lithographically p...

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Bibliographic Details
Published in:Applied physics letters 2024-11, Vol.125 (21)
Main Authors: Huang, Feixuan, Du, Mingye, Ma, Chen, He, Xi, Suo, Feiya, Li, Jiawei, Wu, Tao, Wang, Nan
Format: Article
Language:English
Subjects:
Lamb waves
Lithium niobates
Resonant frequencies
Resonators
Silicon dioxide
Thickness ratio
Wireless communication systems
Zero temperature coefficient
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Summary:In this paper, a high-frequency lamb wave resonator (LWR) with near zero temperature coefficient of frequency (TCF) is designed, fabricated, and measured. The reported resonator is of a bi-layer structure consisting of lithium niobate (LiNbO3 or LN) and silicon dioxide (SiO2), and lithographically patterned aluminum (Al) inter-digitated electrode fingers on top of the bi-layer structure. By adjusting the thickness ratio of LN and SiO2 layers, both the electromechanical coupling ( k2) and the TCF, including both TCF at resonant frequency (TCFr) and TCF at anti-resonant frequency (TCFa), of the thickness shear (TS) type LWR are optimized. Experimental results, which are in excellent agreement with theoretical analysis, show that the fabricated 11.6-GHz LWR achieves a k2 of 12.2%, with TCFr and TCFa being −4.2 and −5.4 ppm/K over a temperature range from 30 °C to 85 °C, respectively, demonstrating huge potential in applications for future wireless communication systems above 10 GHz.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0233718