Enhanced Accuracy of Force Application for AFM Nanomanipulation Using Nonlinear Calibration of Optical Levers

The atomic force microscope (AFM) has been widely used as a nano-effector with a function of force sensing to detect interaction forces between an AFM tip and a sample, thereby controlling the process of the nanomanipulation. However, both the extent and accuracy of force application are significant...

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Bibliographic Details
Published in:IEEE sensors journal 2008-08, Vol.8 (8), p.1478-1485
Main Authors: Hui Xie, Vitard, J., Haliyo, D.S., Regnier, S.
Format: Article
Language:English
Subjects:
Atom optics
Atomic force microscope (AFM)
Atomic force microscopy
Calibration
force calibration
Force control
Levers
Microscopes
Nanocomposites
nanomanipulation
Nanomaterials
Nanostructure
Nonlinear optics
Nonlinearity
nonlinearity compensation
optical lever
Optical sensors
Photodiodes
Position sensitive particle detectors
Process control
Voltage
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Summary:The atomic force microscope (AFM) has been widely used as a nano-effector with a function of force sensing to detect interaction forces between an AFM tip and a sample, thereby controlling the process of the nanomanipulation. However, both the extent and accuracy of force application are significantly limited by the nonlinearity of the commonly used optical lever with a nonlinear position-sensitive detector (PSD). In order to compensate the nonlinearity of the optical lever, a nonlinear calibration method is presented. This method applies the nonlinear curve fit to a full-range position-voltage response of the photodiode, obtaining a continuous function of its voltage-related sensitivity. Thus, interaction forces can be defined as integrals of this sensitivity function between any two responses of photodiode voltage outputs, instead of rough transformation with a single conversion factor. The lateral position-voltage response of the photodiode, a universally acknowledged puzzle, was directly characterized by an accurately calibrated force sensor composed of a tippless piezoresistive microcantilever and corresponding electronics, regardless of any knowledge of the cantilevers and laser measuring system. Experiments using a rectangular cantilever (normal spring constant 0.24 N/m) demonstrated that the proposed nonlinear calibration method restrained the sensitivity error of normal position-voltage responses to 3.6% and extended the force application range.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2008.920722