Polyurethane rubber all-polymer artificial hair cell sensor

In this paper, we present the design, fabrication process, and preliminary testing results of an artificial hair cell (AHC) sensor made entirely of polymer materials from the substrate level up. The new AHC sensor utilizes polyurethane elastomers for sensing and structures. The AHC can detect two-ax...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2006-08, Vol.15 (4), p.729-736
Main Authors: Engel, J.M., Chen, J., Chang Liu, Bullen, D.
Format: Article
Language:English
Subjects:
Artificial hair cell (AHC)
biomimetic
Chemicals
Condensed matter: structure, mechanical and thermal properties
Corrosion resistance
Deflection
Elastomers
Exact sciences and technology
Fabrication
force sensitive resistor (FSR)
Force sensors
Hair
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials testing
Mechanical and acoustical properties
adhesion
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
polymer
Polymers
Polyurethane resins
Process design
Resistors
Rubber
Sensors
Silicone resins
Solid surfaces and solid-solid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thermal resistance
Thresholds
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Summary:In this paper, we present the design, fabrication process, and preliminary testing results of an artificial hair cell (AHC) sensor made entirely of polymer materials from the substrate level up. The new AHC sensor utilizes polyurethane elastomers for sensing and structures. The AHC can detect two-axis deflection of a vertical polyurethane hair using carbon-impregnated polyurethane force sensitive resistors (FSRs). AHC with cylindrical hair cross-section exhibit sensitivity of 245 ppm resistance change for every micron (ppm/mum) of tip deflection. The AHC threshold detection level of 3 mum compares favorably with insect tactile hair cells having thresholds on the order of 30-50 mum. Furthermore, we have characterized the mechanical and chemical properties of two-part room-temperature-curing polyurethane elastomers in the context of microfabrication. Elastic properties, chemical resistance, thermal oxidative decomposition, and adhesion properties are tested and compared to the performance of polydimethylsiloxane (PDMS), a widely used elastomeric material. Polyurethane elastomer exhibit superior mechanical tear resistance and ability to adhere to substrates compared to PDMS
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2006.879373