Ultra-precision positioning system using robust sliding mode observer and control

► The robust sliding mode control based on reduced order observer is proposed to overcome the model imperfections in ultra-precision positioning system. ► The reduced order sliding mode observer enables the states and the estimated outputs to be available for controller design. ► The manifold of the...

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Bibliographic Details
Published in:Precision engineering 2013-01, Vol.37 (1), p.235-240
Main Authors: Kim, K.H., Kim, P.J., You, K.H.
Format: Article
Language:English
Subjects:
Control systems
Design engineering
Manifolds
Observers
Output feedback
Output feedback control
Positioning
Reduced order
Reduced order observer
Sliding mode
Sliding mode control
Ultra-precision stage
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Summary:► The robust sliding mode control based on reduced order observer is proposed to overcome the model imperfections in ultra-precision positioning system. ► The reduced order sliding mode observer enables the states and the estimated outputs to be available for controller design. ► The manifold of the sliding mode control is composed of the estimated output. ► The sliding mode control is designed in output feedback form. ► The effectiveness has been proved from the application of an ultra-precision stage. In this paper, the robust sliding mode control based on reduced order observer is proposed to overcome the model imperfections in ultra-precision positioning system. The reduced order sliding mode observer enables the states and the estimated outputs to be available for controller design. The manifold of the sliding mode control is composed of the estimated output only instead of system states. Using the reduced order observer, the sliding mode control is designed in output feedback form. The effectiveness of the proposed control algorithm has been proved from the application of an ultra-precision stage.
ISSN:0141-6359
1873-2372
DOI:10.1016/j.precisioneng.2012.07.009