Characterization and modeling of a piezoresistive three-axial force micro sensor

•A highly sensitive three-axial force microsensor has been characterized.•A nanoindenter and a shear–pull tester have been used to apply forces on the MEMS sensor.•High linearity and low hysteresis under normal forces have also been demonstrated. To mimic human mechanoreceptors and give sense of tou...

Full description

Saved in:
Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2013-10, Vol.201, p.188-192
Main Authors: Alcheikh, N., Coutier, C., Giroud, S., Poulain, C., Rey, P.
Format: Article
Language:English
Subjects:
Actuators
Electro-mechanical characterization
Finite element method
Finite element method simulations
High sensitivity
Mathematical analysis
Mathematical models
Robots
Sensors
Three dimensional
Three-axial force micro sensor
Touch
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:•A highly sensitive three-axial force microsensor has been characterized.•A nanoindenter and a shear–pull tester have been used to apply forces on the MEMS sensor.•High linearity and low hysteresis under normal forces have also been demonstrated. To mimic human mechanoreceptors and give sense of touch to robots highly integrated and highly sensitive three-axial force micro sensors are required. In this paper, we present the fabrication and electro-mechanical characterization of silicon based 3D force micro sensors with piezoresistive gauges with a footprint less than 1.5mm2. The measurements have been validated with a Finite Element Modeling (FEM). The sensor sensitivities to normal and tangential loads are about 1.03mV/V/mN and 1.6mV/V/mN, respectively. For such high integrated 3D force sensors these values are among the highest sensitivities reported in the literature. High linearity and low hysteresis under normal forces have also been demonstrated.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2013.07.001