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Piezoelectric properties and surface potential behavior in LiNbO3 thin films grown by the radio frequency magnetron sputtering

► The LiNbO3 films were grown on electrically isolated silicon substrate using RF. ► We study ferroelectric properties LiNbO3 films via PFM and KPFM methods. ► The interplay between PFM and KPFM signals occurs simultaneously. ► The surface potential relaxation occurs by spreading a charge around the...

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Bibliographic Details
Published in:Journal of alloys and compounds 2014-02, Vol.586, p.S336-S338
Main Authors: Zhukov, R.N., Bykov, A.S., Kiselev, D.A., Malinkovich, M.D., Parkhomenko, Yu.N.
Format: Article
Language:English
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Summary:► The LiNbO3 films were grown on electrically isolated silicon substrate using RF. ► We study ferroelectric properties LiNbO3 films via PFM and KPFM methods. ► The interplay between PFM and KPFM signals occurs simultaneously. ► The surface potential relaxation occurs by spreading a charge around the domains. In this paper we report on using the atomic force microscope in piezoresponse and Kelvin modes to image grains, ferroelectric domains and surface potential in lithium niobate thin films. The radio frequency magnetron sputter system was used to deposit LiNbO3 thin films on (100)-oriented Si substrate with SiO2 layer. The surface of the sample showed small grains which diameter ranged from 70nm to 130nm and roughness less than 13nm. Using the electric field from the biased conducting AFM tip showed that it was possible to form and subsequently visualize the ferroelectric state in LiNbO3 thin films synthesized on electrically isolated silicon substrate. We also report on surface charge retention on ferroelectric thin films by Kelvin probe microscope in comparison with the piezoresponse signal. We also regard the possibility of retention of surface charge obtained by Kelvin probe microscopy in comparison with piezoresponse signal on ferroelectric thin films.
ISSN:0925-8388
1873-4669
DOI:10.1016/j.jallcom.2013.01.116