Morphological features of silicon substrate by using different frequency laser ablation in air and water

• Published in: Applied surface science 2014-10, Vol.317, p.666-671
• Main Authors: Xu, J.Y., Hu, H., Lei, Y.L.
• Format: Article
• Language: English
• Subjects: Ablation; Bubbles; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Debris; Exact sciences and technology; High frequencies; Laser frequency; Lasers; Low frequencies; Mathematical models; Morphological features; Nanosecond laser; Physics; Silicon
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2014.08.038

•The interaction of the laser and silicon is investigated in air and water.•A numerical model is used to ascertain the time of the bubble motion in water.•More debris is found when using high frequency ablation in air.•Morphology of craters is better in low frequency ablation in water.•Bubbles generated by high frequency ablation affect laser transmission. The interaction of the nanosecond laser (FWHM=30ns, λ=355nm) and monocrystalline silicon is investigated in air and water. Conventional optical and scanning electron microscopes are used to characterize surface ablation of the monocrystalline silicon. A numerical model is used to ascertain the time of the bubble motion in water. Morphological features of the laser-induced crater are different under various environments and frequencies. More debris is found when using high frequency ablation, and a larger zone is affected by heat when using low frequency ablation in air. There is no debris found in water, and the morphology of craters is better in low frequency ablation than that in high frequency ablation because bubbles generated by high frequency ablation affect laser transmission.