3D force sensor for biomechanical applications

► An accurate miniature 3D force sensor is designed and realized. ► Many thin silicon pillars form the spring element of the sensor in all its degree of freedom and carry the load. ► Sensor has a high force range of 50N. ► Small electrode gaps of 250nm are realized using a patterned SOI-wafer as ele...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2012-08, Vol.182, p.28-33
Main Authors: Brookhuis, R.A., Lammerink, T.S.J., Wiegerink, R.J., de Boer, M.J., Elwenspoek, M.C.
Format: Article
Language:English
Subjects:
Actuators
Amplification
Biomechanics
Capacitive sensing
Force sensor
Gaps
Haptic
Human
Human interaction
Micromachining
Power transfer
Sensors
Silicon
Tactile robot
Three dimensional
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Summary:► An accurate miniature 3D force sensor is designed and realized. ► Many thin silicon pillars form the spring element of the sensor in all its degree of freedom and carry the load. ► Sensor has a high force range of 50N. ► Small electrode gaps of 250nm are realized using a patterned SOI-wafer as electrode. ► The normal force measurements show a large sensitivity of 16pF/N. A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand and its environment. The sensor measures the normal force and two perpendicular moments by dividing the read-out into four quadrants. The fabrication process is based on silicon fusion bonding allowing the realization of extremely small gaps (250nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16pF/N and a full-scale range of 50N.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2012.04.035