Ethanol gas and humidity sensors of CuO/Cu2O composite nanowires based on a Cu through-silicon via approach

High density CuO/Cu2O composite nanowires were synthesized on simpler Cu through-silicon via by heated oxidation. XRD spectrum analysis and HR-TEM revealed that these nanowires had Cu2O cubic crystalline and CuO monoclinic structures. The sensing current of the CuO/Cu2O composite nanowires decreased...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2016-03, Vol.224, p.95-102
Main Authors: Hsu, Cheng-Liang, Tsai, Jia-Yu, Hsueh, Ting-Jen
Format: Article
Language:English
Subjects:
Actuators
COMPOSITES
Copper
COPPER OXIDE
Cu2O
CuO
CUPROUS OXIDE
Ethanol
ETHYL ALCOHOL
Humidity
MICROWIRE
Nanowires
Relative humidity
Sensor
Sensors
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Summary:High density CuO/Cu2O composite nanowires were synthesized on simpler Cu through-silicon via by heated oxidation. XRD spectrum analysis and HR-TEM revealed that these nanowires had Cu2O cubic crystalline and CuO monoclinic structures. The sensing current of the CuO/Cu2O composite nanowires decreased as the ethanol concentration increased due to their p-type material property. The relative humidity response of the nanowires increased along with the relative humidity. The UV photoresponse of the CuO/Cu2O composite nanowires also increased with the relative humidity, due to the photocatalytic layer that formed on the nanowire surface.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2015.10.018