A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time

• Published in: Applied surface science 2016-11, Vol.387, p.569-580
• Main Authors: Xu, Qiu, Yang, Zhuoqing, Fu, Bo, Li, Jianhua, Wu, Hao, Zhang, Qihuan, Sun, Yunna, Ding, Guifu, Zhao, Xiaolin
• Format: Article
• Language: English
• Subjects: Acceleration; Cantilever beams; Compliant cantilever; Contact; Contact time; Electrodes; Inertial; Inertial micro-switch; MEMS; Pulse width; Simulation; Surface-micromachining; Thresholds
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2016.06.164

•The designed cantilever beam attached to the proof mass can endure a larger shock acceleration (∼1000g order of magnitude) compared to those traditional designs (∼100g order of magnitude).•Effect of the pulse width on the threshold acceleration, the response time and the contact time is investigated.•A constraint sleeve structure is introduced to lower the off-axis sensitivity. A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the movable electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (aths) under stable switch-on state is about 288g and the contact time is about 198μs when the pulse width of acceleration loads is 1ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150μs when the threshold acceleration is about 288g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the simulation ones.