A silicon microfluidic chip integrating an ordered micropillar array separation column and a nano-electrospray emitter for LC/MS analysis of peptides

This article presents the development and performance of new silicon microfluidic devices, called E-spray chips, integrating both a reversed-phase separation column and a nano-electrospray emitter. The microchips are made according to standard silicon microtechnology procedures including photolithog...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2008-09, Vol.134 (2), p.438-446
Main Authors: Mery, E., Ricoul, F., Sarrut, N., Constantin, O., Delapierre, G., Garin, J., Vinet, F.
Format: Article
Language:English
Subjects:
Liquid chromatography
Mass spectrometry
Microdevice
Nano-electrospray
Surface functionalisation
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Summary:This article presents the development and performance of new silicon microfluidic devices, called E-spray chips, integrating both a reversed-phase separation column and a nano-electrospray emitter. The microchips are made according to standard silicon microtechnology procedures including photolithography, deep reactive ion etching and molecular bonding. The separation column is a perfectly ordered 2-dimensional array of squared micropillars, directly etched in the silicon substrate, and the electrospray emitter is a planar nib-like nanotip. Two chemical procedures for the separation column reversed-phase coating were tested: (i) a liquid phase “chip by chip” process with a C18-alkylated silane and (ii) a vapour phase collective process with a C10-perfluorated silane. Analyses of standard tryptic digests of cytochrome c in hydrodynamic pumping mode have demonstrated good quality spray and effective separation performance of these microdevices with a higher retention capacity for C10-perfluorated coating. These new microchips, which can be produced on a very large scale by a mass production process, from microfabrication to chemical treatment, appear to be very promising analytical tools for proteomics research.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2008.05.037