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Through-wafer optical communication using monolithic InGaAs-on-Si LEDs and monolithic PtSi-Si Schottky-barrier detectors

Through-wafer optical communication has been demonstrated in experiments employing two vertically stacked Si wafers, the upper one with In/sub 0.15/Ga/sub 0.85/As-In/sub 0.15/Al/sub 0.85/As double-heterostructure LEDs (light-emitting diodes) grown by molecular beam epitaxy on its top surface and the...

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Bibliographic Details
Published in:IEEE photonics technology letters 1991-08, Vol.3 (8), p.761-763
Main Authors: Turner, G.W., Chen, C.K., Tsaur, B.-Y., Waxman, A.M.
Format: Article
Language:English
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Summary:Through-wafer optical communication has been demonstrated in experiments employing two vertically stacked Si wafers, the upper one with In/sub 0.15/Ga/sub 0.85/As-In/sub 0.15/Al/sub 0.85/As double-heterostructure LEDs (light-emitting diodes) grown by molecular beam epitaxy on its top surface and the lower one with PtSi-Si Schottky-barrier detectors fabricated on its bottom surface. Infrared radiation emitted by the LEDs in a band peaking at 1.12 mu m, just beyond the Si absorption edge, is transmitted through the upper Si wafer, focused with a 25-mm focal-length lens, transmitted through the lower Si wafer, and detected by the Pt-Si detectors. For a single LED-detector pair, the detector signal-to-noise ratio was 10:1 for an LED drive current, of 1 mA at room temperature. The results suggest that through-wafer communication using LEDs and Schottky-barrier detectors is a promising approach for optical interconnects in stacked wafer architectures.< >
ISSN:1041-1135
1941-0174
DOI:10.1109/68.84478