Selectively C-13-enriched diamond films studied by nuclear magnetic resonance
The quality of hot-filament chemical-vapor-deposited diamond films is quantitatively assessed by H-1 and C-13 nuclear-magnetic-resonance (NMR) spectroscopy. As the carbon mole fraction increases from 0.053 to 0.074 in the gas phase, film quality in terms of sp2 carbon content, bonding disorder, and...
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| Published in: | Journal of applied physics 1992-03, Vol.71, p.2884-2889 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Online Access: | Get full text |
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