Characterization of titanium nitride layers by grazing-emission X-ray fluorescence spectrometry

• Published in: Applied surface science 1998-02, Vol.125 (2), p.129-136
• Main Authors: Wiener, G., Kidd, S.J., Mutsaers, C.A.H., Wolters, R.A.M., de Bokx, P.K.
• Format: Article
• Language: English
• Subjects: Condensed matter: structure, mechanical and thermal properties; Diffusion barriers; Exact sciences and technology; Grazing-emission; Physics; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Thin films; X-ray fluorescence
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/S0169-4332(97)00412-1

Grazing-emission X-ray fluorescence spectrometry is a new development in X-ray metrology instrumentation. The combination of wavelength-dispersive detection with a total-reflection geometry in the detection path allows thin layer characterization also for light elements. The technique was applied to analyze a series of titanium nitride layers, reactively sputtered using different Ar N 2 flow ratios of the working gas. Composition, thickness and density of the layers result from fitting the experimental data to model calculations. It was found that above a critical flow value, the samples are slightly over-stoichiometric (with respect to nitrogen) with a considerably reduced density. The GEXRF method has potential both for complete layer characterization and for process control with layer density as the control parameter.