Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible

Metalenses are attractive alternatives to conventional bulky refractive lenses owing to their superior light-modulating performance and sub-micrometre-scale thicknesses; however, limitations in existing fabrication techniques, including high cost, low throughput and small patterning area, have hinde...

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Bibliographic Details
Published in:Nature materials 2023-04, Vol.22 (4), p.474-481
Main Authors: Kim, Joohoon, Seong, Junhwa, Kim, Wonjoong, Lee, Gun-Yeal, Kim, Seokwoo, Kim, Hongyoon, Moon, Seong-Won, Oh, Dong Kyo, Yang, Younghwan, Park, Jeonghoon, Jang, Jaehyuck, Kim, Yeseul, Jeong, Minsu, Park, Chanwoong, Choi, Hojung, Jeon, Gyoseon, Lee, Kyung-il, Yoon, Dong Hyun, Park, Namkyoo, Lee, Byoungho, Lee, Heon, Rho, Junsuk
Format: Article
Language:English
Subjects:
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639/301/1023/1025
639/301/930/1032
639/301/930/543
639/925/357/1015
639/925/927/1021
Argon
Biomaterials
Chemistry and Materials Science
Condensed Matter Physics
Efficiency
Engineering
Fabrication
Fluorides
Lasers
Light
Lithography
Low cost
Manufacturing
Mass production
Materials Science
Nanolithography
Nanotechnology
Optical and Electronic Materials
Polymers
Refractive lenses
Thickness
Virtual reality
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Summary:Metalenses are attractive alternatives to conventional bulky refractive lenses owing to their superior light-modulating performance and sub-micrometre-scale thicknesses; however, limitations in existing fabrication techniques, including high cost, low throughput and small patterning area, have hindered their mass production. Here we demonstrate low-cost and high-throughput mass production of large-aperture visible metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography. Once a 12″ master stamp is imprinted, hundreds of centimetre-scale metalenses can be fabricated using a thinly coated high-index film to enhance light confinement, resulting in a substantial increase in conversion efficiency. As a proof of concept, an ultrathin virtual reality device created with the printed metalens demonstrates its potential towards the scalable manufacturing of metaphotonic devices. The authors propose a method for the scalable manufacturing of metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography, opening a route towards their low-cost, high-throughput mass production.
ISSN:1476-1122
1476-4660
DOI:10.1038/s41563-023-01485-5