Replicated polymeric optical waveguide devices with large core connectable to plastic optical fiber using thermo-plastic and thermo-curable resins

• Published in: Journal of lightwave technology 2006-02, Vol.24 (2), p.919-926
• Main Authors: Mizuno, H., Sugihara, O., Jordan, S., Okamoto, N., Ohama, M., Kaino, T.
• Format: Article
• Language: English
• Subjects: Alignment; Applied sciences; Circuit properties; Core loss; Devices; Electric, optical and optoelectronic circuits; Electronics; Embossing; Exact sciences and technology; Integrated optics. Optical fibers and wave guides; Microelectronic fabrication (materials and surfaces technology); Noise levels; Optical and optoelectronic circuits; Optical couplers; Optical devices; Optical fibers; Optical polymers; Optical waveguides; Photoresists; Plastics; Polymers; Propagation losses; Resins; Resists; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Systems, networks and services of telecommunications; Telecommunications; Telecommunications and information theory; Thermal resistance; Transmission and modulation (techniques and equipments); Yttrium
• ISSN: 0733-8724; 1558-2213
• DOI: 10.1109/JLT.2005.862454

Polymeric optical waveguide (POW) devices connectable to plastic optical fibers (POFs) fabricated by hot embossing using thermo-plastic resin are presented. Optical waveguides with large core sizes of 500 and 1000 /spl mu/m were fabricated, and a low propagation loss of /spl sim/ 0.2 dB/cm at 650 nm was achieved. A thick photoresist original master to obtain a stamper for hot embossing was fabricated by photolithography with a photoresist. Using photomasks with different patterns, POW device structures were fabricated. Two POW device structures are realized: one is a passive alignment structure and the other is a Y-branch-type POW. By passive alignment structure, POWs directly connected to POFs were realized, and the coupling loss from POF to POF through POW was measured to be 1.6 dB at an optimum core width of 900 /spl mu/m for 980-/spl mu/m core size POFs. Y-branch-type POWs with large core size of 1000 /spl mu/m, branching angle from 2/spl deg/ to 10/spl deg/, and branching top part radius of 200 /spl mu/m were fabricated. An output power ratio of 1:1 from each output port was realized. A compact-size Y-branch-type waveguide device was also proposed. POWs with high thermal resistance of more than 200/spl deg/C were also realized by hot replication using thermo-curable multifunctional methacrylate monomers.