A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology

We present the design, fabrication, and testing of a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor. The accelerometer is fabricated with the silicon-on-insulator microelectromechanical systems (MEMS) technology that bridges surface mi...

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Bibliographic Details
Published in:IEEE sensors journal 2005-12, Vol.5 (6), p.1214-1223
Main Authors: Su, S.X.P., Yang, H.S., Agogino, A.M.
Format: Article
Language:English
Subjects:
Accelerometers
Circuit testing
Double-ended-tuning-fork (DETF) resonator
Fabrication
Force measurement
Force sensors
Microelectromechanical systems
microleverage mechanism
Micromachining
Micromechanical devices
Resonance
resonant accelerometer
Sensors
Silicon on insulator technology
silicon-on-insulator microelectromechanical systems (SOI-MEMS)
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Summary:We present the design, fabrication, and testing of a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor. The accelerometer is fabricated with the silicon-on-insulator microelectromechanical systems (MEMS) technology that bridges surface micromachining and bulk micromachining by integrating the 50-/spl mu/m-thick high-aspect ratio MEMS structure with the standard circuit foundry process. Two DETF resonators serve as the force sensor measuring the acceleration through a frequency shift caused by the inertial force acting as axial loading. Two-stage microleverage mechanisms with an amplification factor of 80 are designed for force amplification to increase the overall sensitivity to 160 Hz/g, which is confirmed by the experimental value of 158 Hz/g. Trans-resistance amplifiers are designed and integrated on the same chip for output signal amplification and processing. The 50-/spl mu/m thickness of the high-aspect ratio MEMS structure has no effect on the amplification factor of the mechanism but contributes to a greater capacitance force; therefore, the resonator can be actuated by a much lower ac voltage comparing to the 2-/spl mu/m-thick DETF resonators. The testing results agree with the designed sensitivity for static acceleration.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2005.857876