Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films
The mass sensitivity of an AlN thin film resonators operated in air at 6-8GHz has been investigated in theory and experiment. The 30x30D*mm wide resonators included a 180-300nm thick, highly oriented AlN thin film, bottom and top electrode, and an acoustic reflector made of AlN/SiO2 multilayers. The...
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| Published in: | Sensors and actuators. B, Chemical Chemical, 2006-04, Vol.114 (2), p.681-686 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Citations: | Items that this one cites Items that cite this one |
| Online Access: | Get full text |
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