A new FEM-based approach on the modeling of stress-induced velocity shift of piezoelectric surface acoustic wave resonators

• Published in: Ultrasonics 2024-11, Vol.148, p.107521, Article 107521
• Main Authors: Naghdi, Masoud, Zhang, Haifeng, Sreedharan, S.V., Ju, S., Desai, M.H.
• Format: Article
• Language: English
• Subjects: SAW Materials & Propagation; Transducer Modeling (FEA and Analytical); Wave Propagation (including Elastic Waves)
• ISSN: 0041-624X; 1874-9968; 1874-9968
• DOI: 10.1016/j.ultras.2024.107521

•Utilizing COMSOL Multiphysics and MATLAB is the new FEM approach provided by this article.•The results in this paper have more consistency with the experimental results.•The simulation approach can be extended for frequency responses of the strain sensors with complicated geometries. A novel methodology is introduced for the computation of stress-induced surface acoustic wave velocity shifts in piezoelectric resonators including quartz, lithium niobate and langasite resonators. The numerical framework has been verified through a comparative analysis of experimental and Finite Element Method (FEM) results for quartz resonators. This approach introduces the combined capabilities of COMSOL Multiphysics and MATLAB, facilitated by LiveLink, to systematically calculate all parameters contributing to the perturbation integral. The findings have a better accuracy using the LiveLink methodology in this study compared to prior approaches that rely on average stress and strain calculations in the central point of the resonator. Moreover, the utilization of LiveLink not only enhances accuracy but also establishes MATLAB as a fundamental software platform for interfacing with COMSOL Multiphysics. The proposed approach in this paper can extend to complex strain sensors or investigations into the influence of temperature and imbalanced loading effects in future research endeavors. Furthermore, the LiveLink approach introduced herein can be extended to optimize crystal orientation and identify premium wave directions, thereby contributing to the enhanced design of Surface Acoustic Wave (SAW) resonators. This innovative methodology is used to advance the understanding and application of stress-induced velocity shifts in SAW devices, presenting future developments in sensor technologies and resonator designs. © 2024 Elsevier Science. All rights reserved.