A simple bidirectional linear microactuator for nanopositioning - the "Baltan" microactuator

A new linear microactuator, using bulk PZT and electro-discharge-machined components, generates a sliding velocity and force of 100 mm/s and 12 mN, respectively, in either direction, and a peak velocity and force of 212 mm/s and 44 mN, respectively. Using a simple combination of two slightly differe...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2006-06, Vol.53 (6), p.1160-1168
Main Authors: Friend, J., Gouda, Y., Nakamura, K., Ueha, S.
Format: Article
Language:English
Subjects:
Acoustics
Assembly
Bidirectional
Computer-Aided Design
Crystallization
Design methodology
Electrochemistry - instrumentation
Electrochemistry - methods
Equipment Design
Equipment Failure Analysis
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
General equipment and techniques
Hydraulic actuators
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Microactuators
Microelectrodes
Micromanipulation - instrumentation
Micromanipulation - methods
Micromechanical devices
Miniaturization
Nanocomposites
Nanomaterials
Nanopositioning
Nanostructure
Nanotechnology - instrumentation
Nanotechnology - methods
Physics
Piezoelectric actuators
Piezoelectricity
Resonance
Resonant frequency
Sliders
Sliding
Static Electricity
Transducers
Ultrasonics
Ultrasonics, quantum acoustics, and physical effects of sound
Vibration
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Summary:A new linear microactuator, using bulk PZT and electro-discharge-machined components, generates a sliding velocity and force of 100 mm/s and 12 mN, respectively, in either direction, and a peak velocity and force of 212 mm/s and 44 mN, respectively. Using a simple combination of two slightly different beams placed in contact with a slider, and vibrated at two different resonance frequencies, 508 and 522 kHz, by a specially designed, axially vibrating piezoelectric element, bidirectional linear motion was obtained. By simply reducing the length of the applied signal, the sliding distance was reduced to 90 nm /spl plusmn/ 2 nm, which could be improved with a variety of control methods. The design offers not only silent operation, slider clamping upon removal of power, and all of the other advantages of piezoelectric actuators, but also the potential to be further reduced in size to sub-mm/sup 3/ for microrobotics and other applications.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2006.1642514