Copper Loaded on Sol-Gel-Derived Alumina Adsorbents for Phosphine Removal

• Published in: Journal of the Air & Waste Management Association (1995) 2010-05, Vol.60 (5), p.629-635
• Main Authors: Hsu, Jung-Nan, Bai, Hsunling, Li, Shou-Nan, Tsai, Chuen-Jinn
• Format: Article
• Language: English
• Subjects: Adsorbents; Adsorption; Air Pollutants - isolation & purification; Air pollution; Air Pollution - prevention & control; Aluminum oxide; Aluminum Oxide - chemistry; Applied sciences; Catalysis; Chemical properties; Composition; Copper; Copper - chemistry; Exact sciences and technology; Gases; Gels; Outdoor air quality; Phosphines - isolation & purification; Pollution; Pore size
• ISSN: 1096-2247; 2162-2906
• DOI: 10.3155/1047-3289.60.5.629

The hydride gas of phosphine (PH 3 ) is commonly used for semiconductor and optoelectronic industries. The local scrubbers must immediately abate it because of its high toxicity. In this study, copper (Cu) loaded on the sol-gel-derived γ-alumina (Al 2 O 3 ) adsorbents are prepared and tested to investigate the possibility of PH 3 removal and sorbent regeneration. Test results showed that during the breakthrough time of over 99% PH 3 removal efficiency, the maximum adsorption capacity of Cu loaded on the sol-gel-derived γ-Al 2 O 3 adsorbent is 18 mg-PH 3 /gadsorbent. This is much higher than that of Cu loaded on the commercial γ-Al 2 O 3 adsorbent- 8.6 mg-PH 3 /gadsorbent. The high specific surface area, narrow pore size distribution, and well dispersion of Cu loaded on the sol-gel-derived γ-Al 2 O 3 could be the reasons for its high PH 3 adsorption capacity. The regeneration test shows that Cu loaded on the sol-gel-derived γ-Al 2 O 3 adsorbent can be regenerated after a simple air purging procedure. The cumulative adsorption capacity for five regeneration cycles is 65 mg-PH 3 /g-adsorbent, which is approximately double that of the Cu/zeolite adsorbent demonstrated in the literature.