Robust friction compensation for submicrometer positioning and tracking for a ball-screw-driven slide system

Ball-screw-driven slide systems are largely used in industry for motion control applications. Their performance using standard proportional-integral-derivative (PID) control algorithm is unsatisfactory in submicrometer motion control because of nonlinear friction effects. In this article, controller...

Full description

Saved in:
Bibliographic Details
Published in:Precision engineering 2000-04, Vol.24 (2), p.160-173
Main Authors: Ro, Paul I., Shim, Wonbo, Jeong, Sanghwa
Format: Article
Language:English
Subjects:
Algorithms
Applied sciences
Ball-screw
Computer science
control theory
systems
Control system synthesis
Control theory. Systems
Disturbance observer
Exact sciences and technology
Friction compensation
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Motion control
Nonlinear control systems
Physics
Position control
Robustness (control systems)
Servo and control equipment
robots
Submicrometer
Three term control systems
Two term control systems
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Ball-screw-driven slide systems are largely used in industry for motion control applications. Their performance using standard proportional-integral-derivative (PID) control algorithm is unsatisfactory in submicrometer motion control because of nonlinear friction effects. In this article, controllers based on a bristle-type nonlinear contact model are developed and implemented for submicrometer motion. For submicrometer positioning, a proportional-derivative (PD) control scheme with a nonlinear friction estimate algorithm is developed, and its performance is compared with that of a PID controller. For tracking, a disturbance observer was added to reject external disturbances and to improve robustness. The experimental results indicate that the proposed controller has consistent performance in positioning with under 1.5% of steady-state error in the submicrometer range. For tracking performance, the proposed controller shows good and robust tracking with respect to parameter variation.
ISSN:0141-6359
1873-2372
DOI:10.1016/S0141-6359(00)00030-1