MEMS-based fast scanning probe microscopes

• Published in: Ultramicroscopy 2010-05, Vol.110 (6), p.599-604
• Main Authors: Tabak, F.C., Disseldorp, E.C.M., Wortel, G.H., Katan, A.J., Hesselberth, M.B.S., Oosterkamp, T.H., Frenken, J.W.M., van Spengen, W.M.
• Format: Article
• Language: English
• Subjects: Atomic force microscopy; Devices; Dynamical systems; Dynamics; High-speed scanning; Mechanical systems; MEMS; Microelectromechanical systems; Scanning; Scanning probe microscopes; Scanning probe microscopy
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/j.ultramic.2010.02.018

Scanning probe microscopy is a frequently used nanometer-scale surface investigation technique. Unfortunately, its applicability is limited by the relatively low image acquisition speed, typically seconds to minutes per image. Higher imaging speeds are desirable for rapid inspection of samples and for the study of a range of dynamic surface processes, such as catalysis and crystal growth. We have designed a new high-speed scanning probe microscope (SPM) based on micro-electro mechanical systems (MEMS). MEMS are small, typically micrometer size devices that can be designed to perform the scanning motion required in an SPM system. These devices can be optimized to have high resonance frequencies (up to the MHz range) and have very low mass (10 −11 kg). Therefore, MEMS can perform fast scanning motion without exciting resonances in the mechanical loop of the SPM, and hence scan the surface without causing the image distortion from which conventional piezo scanners suffer. We have designed a MEMS z-scanner which we have integrated in commercial AFM (atomic force microscope) and STM (scanning tunneling microscope) setups. We show the first successful AFM experiments.