Characterization of plasma-sprayed Y2O3 coating and investigation of its visual aspect change

Yttria (Y2O3) has been commonly used as a protective coating material because it has strong resistance to plasma erosion with reducing the amount of reaction products generated during the semiconductor/LCD fabrication process. We have investigated the visual aspect of the plasma-sprayed Y2O3 coating...

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Bibliographic Details
Published in:Surface & coatings technology 2011-02, Vol.205 (11), p.3341-3346
Main Authors: Seok, Hyun-Kwang, Choi, Eun Young, Cha, Pil-Ryung, Son, Myung-Chan, Choi, Byoung Lyong
Format: Article
Language:English
Subjects:
Applied sciences
Black spot
Ceramic coatings
Coating
Cross-disciplinary physics: materials science
rheology
Deposition
Exact sciences and technology
Heating
Liquid crystal displays
Materials science
Metals. Metallurgy
Physics
Plasma spray coating
Production techniques
Semi-conductor fabrication equipment
Semiconductors
Spots
Spray coating
Sprayers
Sprays
Surface treatment
Surface treatments
Visual aspect
Visual aspects
Y2O3 coating
Yttrium oxide
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Summary:Yttria (Y2O3) has been commonly used as a protective coating material because it has strong resistance to plasma erosion with reducing the amount of reaction products generated during the semiconductor/LCD fabrication process. We have investigated the visual aspect of the plasma-sprayed Y2O3 coating both experimentally and numerically to propose the process conditions proper for white Y2O3 coating. It was demonstrated that heating of the particle surface in oxygen deficient plasma jet core resulted in the reduction of coating materials associated with the formation of black spots, while the re-oxidation of reduced feed stock materials at long spray distance, where they were exposed to relatively lower temperature of plasma and abundant oxygen, caused the whitening of coating. Based on the results, we proposed a spray coating condition proper for reducing the black spots formed in protective Y2O3 ceramic coating. ►The visual aspect of the plasma-sprayed Y2O3 coating was investigated. ►Overheating of Y2O3 particles in oxygen deficient plasma jet core resulted in black spot at the coating. ►Re-oxidation of reduced particle caused the whitening of coating. ►A spray coating condition proper for reducing the black spots at the coating was proposed.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2010.10.045