Laser forward transfer based on a spatial light modulator

• Published in: Applied physics. A, Materials science & processing Materials science & processing, 2011-01, Vol.102 (1), p.21-26
• Main Authors: Auyeung, R. C. Y., Kim, H., Charipar, N. A., Birnbaum, A. J., Mathews, S. A., Piqué, A.
• Format: Article
• Language: English
• Subjects: Beams (radiation); Characterization and Evaluation of Materials; Coherent light; Condensed Matter Physics; Digital; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Invited Paper; Laser beams; Lasers; Machines; Manufacturing; Nanomaterials; Nanotechnology; Optical and Electronic Materials; Optical elements, devices, and systems; Optical processors, correlators, and modulators; Optics; Physics; Physics and Astronomy; Processes; Real time; Spatial light modulators; Surfaces and Interfaces; Thin Films
• ISSN: 0947-8396; 1432-0630
• DOI: 10.1007/s00339-010-6054-9

We report the first demonstration of laser forward transfer using a real-time reconfigurable mask based on a spatial light modulator. The ability to dynamically change the projected beam shape and size of a coherent light source, in this case a 355-nm pulsed UV laser, represents a significant technological advancement in laser direct-write processing. The application of laser transfer techniques with adaptive control of the laser beam pattern is unique and represents a paradigm shift in non-lithographic processing. This work describes how the size and shape of an incident laser beam can be dynamically controlled in real time with the use of a digital micromirror device (DMD), resulting in laser-printed functional nanomaterials with geometries identical to those of the projected beam. For applications requiring additive non-lithographic techniques, this novel combination, which relies on the laser forward transfer of variable, structured voxels, represents a dramatic improvement in the capabilities and throughput of laser direct-write processes.