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Air-bearing linear actuator for highly precise tracking

An actuator consisting of a linear air bearing and a voice coil motor (VCM) of the linear type was designed for precise tracking. The stiffness of the air bearing was strong enough so that the moving coil of a VCM fixed to the air bearing slider arm could form a cantilever system. The linear actuato...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2003-03, Vol.39 (2), p.812-818
Main Authors: Mori, S., Hoshino, T., Obinata, G., Ouchi, K.
Format: Article
Language:English
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Summary:An actuator consisting of a linear air bearing and a voice coil motor (VCM) of the linear type was designed for precise tracking. The stiffness of the air bearing was strong enough so that the moving coil of a VCM fixed to the air bearing slider arm could form a cantilever system. The linear actuator showed a much higher resonance frequency than a conventional rotary actuator. Due to the high resonance frequency, the servo bandwidth became significantly wider. The linear actuator could be stepped at 1 nm resolution without overshoots and undershoots and the rise time was less than 0.5 ms.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2003.808930