Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application

We have established methods for the design and fabrication of a novel MEMS actuator for flow control based on the electrostrictive principle. Patterned metal electrodes were employed in order to obtain large out-of-plane deformation. A series of finite-element method (FEM) analyses of the electrical...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2007-06, Vol.16 (3), p.753-764
Main Authors: Pimpin, A., Suzuki, Y., Kasagi, N.
Format: Article
Language:English
Subjects:
Actuators
Capacitive sensors
Deformation
Design methodology
Electrodes
Electrostriction
Electrostrictive polymer
Exact sciences and technology
Fabrication
Finite element method
Finite element methods
finite-element method (FEM) analysis
Flow control
Frequency estimation
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical models
Mechanical instruments, equipment and techniques
Microelectromechanical systems
Micromechanical devices
Micromechanical devices and systems
out-of-plane deformation
patterned metal electrode
Performance analysis
Physics
synthetic jet
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Summary:We have established methods for the design and fabrication of a novel MEMS actuator for flow control based on the electrostrictive principle. Patterned metal electrodes were employed in order to obtain large out-of-plane deformation. A series of finite-element method (FEM) analyses of the electrical and strain fields was performed in order to optimize the design parameters. The maximum deformation for 2-mm-diameter actuators reaches 112 mum, which is 5.6% of the actuator diameter and six times larger than that of the plain metal-electrode actuator. The elastic energy density reaches 29% of the stored electrostatic energy. The power consumption at the driving frequency of 100 Hz is estimated to be on the order of 100 muW. The present electrostrictive actuator has a fast response, and its operating frequency is up to several kilohertz. A synthetic jet issuing from a 0.4-mm orifice is successfully developed using the present electrostrictive actuator, and this demonstrates the viability of the present actuator in active flow control.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2007.895222