Shear mode coupling and tilted grain growth of A1N thin films in BAW resonators

Polycrystalline A1N thin films were deposited by RF reactive magnetron sputtering on Pt(111)/Ti electrode films. The substrates were tilted by an angle ranging from 40 degrees to 70 degrees with respect to the target normal. A low deposition temperature and a high sputter gas pressure were found ide...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2006-07, Vol.53 (7), p.1339
Main Authors: Martin, Fabrice, Jan, Marc-Etienne, Rey-Mermet, Samuel, Belgacem, Brahim, Su, Dong, Cantoni, Marco, Muralt, Paul
Format: Article
Language:English
Online Access:Get full text
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