Loading…

Numerical study of bulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modesa

In bulk acoustofluidic devices, acoustic resonance modes for fluid and microparticle handling are traditionally excited by bulk piezoelectric (PZE) transducers. In this work, it is demonstrated by numerical simulations in three dimensions that integrated PZE thin-film transducers, constituting less...

Full description

Saved in:
Bibliographic Details
Published in:The Journal of the Acoustical Society of America 2021-07, Vol.150 (1), p.634-645
Main Authors: Steckel, André G., Bruus, Henrik
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In bulk acoustofluidic devices, acoustic resonance modes for fluid and microparticle handling are traditionally excited by bulk piezoelectric (PZE) transducers. In this work, it is demonstrated by numerical simulations in three dimensions that integrated PZE thin-film transducers, constituting less than 0.1% of the bulk device, work equally well. The simulations are performed using a well-tested and experimentally validated numerical model. A water-filled straight channel embedded in a mm-sized bulk glass chip with a 1- μ m-thick thin-film transducer made of Al0.6Sc0.4N is presented as a proof-of-concept example. The acoustic energy, radiation force, and microparticle focusing times are computed and shown to be comparable to those of a conventional bulk silicon-glass device actuated by a bulk lead-zirconate-titanate transducer. The ability of thin-film transducers to create the desired acoustofluidic effects in bulk acoustofluidic devices relies on three physical aspects: the in-plane-expansion of the thin-film transducer under the applied orthogonal electric field, the acoustic whole-system resonance of the device, and the high Q-factor of the elastic solid, constituting the bulk part of the device. Consequently, the thin-film device is remarkably insensitive to the Q-factor and resonance properties of the thin-film transducer.
ISSN:0001-4966
1520-8524
DOI:10.1121/10.0005624