Reactive sputtering of NbCx-based nanocomposite coatings: An up-scaling study

• Published in: Surface & coatings technology 2014-08, Vol.253, p.100-108
• Main Authors: Nedfors, N., Tengstrand, O., Flink, A., Andersson, A.M., Eklund, P., Hultman, L., Jansson, U.
• Format: Article
• Language: English
• Subjects: Applied sciences; Carbide; Contact resistance; Cross-disciplinary physics: materials science; rheology; Electrical contacts; Exact sciences and technology; Friction; Materials science; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Production techniques; Surface treatment; Surface treatments; Thin film
• ISSN: 0257-8972; 1879-3347; 1879-3347
• DOI: 10.1016/j.surfcoat.2014.05.021

Nanocomposite Nb-C coatings, with a C/Nb ratio of 0.93–1.59, have been deposited by reactive sputtering in a commercial sputtering system where the C is supplied from an acetylene gas at deposition rates of up to 200nm/min. The coatings are compared to non-reactively sputtered Nb-C coatings deposited from Nb and C targets in lab-scale equipment at deposition rates two orders of magnitude lower. X-ray diffraction, X-ray photoelectron spectroscopy, and electron microscopy are used to conclude that all coatings consist of nanocrystalline NbCx grains (nc-NbCx) embedded in a matrix of amorphous C (a-C). The coating performance was evaluated in terms of their mechanical, tribological, and electrical properties. The chemical stability of the coatings was evaluated by exposure to a flowing mixture of corrosive gases. It is found that the coatings have comparable microstructure and performance to the coatings deposited by non-reactive sputtering. The high deposition rate and presence of different C-radicals on the coating surface during film growth for the reactively sputtered coatings are believed to result in a smaller NbCx grain size compared to the non-reactively sputtered coatings (reactive process: 10–3nm, non-reactive process: ~75–3nm). This difference results in a thinner a-C matrix of about 0.2nm, which is not varying with C content for the reactively sputtered coatings. The thinner a-C matrix is reflected in coating properties, with a higher conductivity and slightly higher hardness. The coating richest in C content (C/Nb ratio 1.59) shows the lowest friction (0.23), wear rate (0.17×10−6mm3/mN), and contact resistance before (11mΩ at 10N) and after (30mΩ at 10N) the chemical stability test. These results imply that nc-NbCx/a-C coatings of this composition are a good candidate for electrical contact applications, and that up-scaling of the process is achievable. •Smaller NbCx grains for the reactive case compared to the non-reactive case.•A common growth mechanism is suggested.•The highest chemical stability is achieved for the most C-rich coating.•A C/Nb ratio of 1.59 is most promising considering electrical contact properties.