The journal of vacuum science and technology.
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| New Title: | Journal of vacuum science and technology. A. Vacuum, surfaces, and films. The journal of vacuum science and technology. Journal of vacuum science and technology. B. Microelectronics processing and phenomena. The journal of vacuum science and technology. |
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| Format: | Serial |
| Language: | English |
| Published: |
New York :
Published for the American Vacuum Society by the American Institute of Physics.
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| Holding Statement: | Vol. 1-21, 1964-82 |