Ion Implantation and Ion Beam Processing of Materials : symposium held November 1983 in Boston, Massachusetts, U.S.A. / editors G.K. Hubler ... (et al.).
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| Format: | Book |
| Language: | English |
| Published: |
New York ; Oxford :
North-Holland,
c1984.
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| Series: | Materials Research Society symposia proceedings,
v.27 |
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