Journal of vacuum science and technology. A. Vacuum, surfaces, and films
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| Previous Title: | The journal of vacuum science and technology. Journal of vacuum science and technology. A. Vacuum, surfaces, and films. |
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| Corporate Author: | |
| Format: | Serial |
| Language: | English |
| Published: |
New York :
American Institute of Physicsfor the American Vacuum Society.
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| Subjects: | |
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| Holding Statement: | Vol. 1-14, 1983-96; vol. 17-20, 1999-2002. |