Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis / edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman.
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
c1989
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| Series: | Materials science and process technology series
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| Subjects: | |
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