Library Catalogue Plus

APA (7th ed.) Citation

Rossnagel, S. M., Cuomo, J. J., & Westwood, W. D. (1990). Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood: Fundamentals, etching, deposition, and surface interactions. Noyes Publications.

Chicago Style (17th ed.) Citation

Rossnagel, Stephen M., Jerome J. Cuomo, and William Dickson Westwood. Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions / Edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood: Fundamentals, Etching, Deposition, and Surface Interactions. Park Ridge, N.J.: Noyes Publications, 1990.

MLA (9th ed.) Citation

Rossnagel, Stephen M., et al. Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions / Edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood: Fundamentals, Etching, Deposition, and Surface Interactions. Noyes Publications, 1990.