Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood. fundamentals, etching, deposition, and surface interactions /

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Bibliographic Details
Other Authors: Rossnagel, Stephen M., Cuomo, Jerome J., Westwood, William Dickson
Format: Book
Language:English
Published: Park Ridge, N.J. : Noyes Publications, 1990
Series:Materials science and process technology series
Subjects:
Plasma engineering
Semiconductors > Etching
Plasma etching
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MARC

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