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Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood. fundamentals, etching, deposition, and surface interactions /

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Bibliographic Details
Other Authors:	Rossnagel, Stephen M., Cuomo, Jerome J., Westwood, William Dickson
Format:	Book
Language:	English
Published:	Park Ridge, N.J. : Noyes Publications, 1990
Series:	Materials science and process technology series
Subjects:	Plasma engineering Semiconductors > Etching Plasma etching
Tags:	Add Tag No Tags, Be the first to tag this record!

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