IEEE transactions on semiconductor manufacturing.

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Bibliographic Details
Corporate Authors: Institute of Electrical and Electronics Engineers, IEEE Components,Hybrids and Manufacturing Technology Society, IEEE Electron Devices Society, IEEE Reliability Society, IEEE Solid-State Circuits Society
Format: Serial
Language:English
Published: New York : Institute of Electrical and Electronics Engineers.
Subjects:
Semiconductors > Design and construction > Periodicals.
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Holding Statement:Vol. 1-16, 1988-2003

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