Journal of vacuum science and technology. B. Microelectronics and nanometer structures
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| Previous Title: | Journal of vacuum science and technology. B. Microelectronics processing and phenomena. Journal of vacuum science and technology. B. Microelectronics and nanometer structures. |
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| Corporate Author: | |
| Format: | Serial |
| Language: | English |
| Published: |
New York :
American Institute of Physics for the American Vacuum Society.
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| Subjects: | |
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| Holding Statement: | Vol. 9-14, 1991-96; vol. 17-20, 1999-2002. |