Journal of vacuum science and technology. B. Microelectronics processing and phenomena
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| New Title: | Journal of vacuum science and technology. B. Microelectronics and nanometer structures. Journal of vacuum science and technology. B. Microelectronics processing and phenomena. |
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| Previous Title: | The journal of vacuum science and technology. Journal of vacuum science and technology. B. Microelectronics processing and phenomena. |
| Corporate Author: | |
| Format: | Serial |
| Language: | English |
| Published: |
New York :
American Institute of Physics for the American Vacuum Society.
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| Subjects: | |
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| Holding Statement: | Vol. 1-8, 1983-90 |