Journal of vacuum science and technology. B. Microelectronics processing and phenomena

Saved in:
Bibliographic Details
New Title:Journal of vacuum science and technology. B. Microelectronics and nanometer structures. Journal of vacuum science and technology. B. Microelectronics processing and phenomena.
Previous Title:The journal of vacuum science and technology. Journal of vacuum science and technology. B. Microelectronics processing and phenomena.
Corporate Author: American Vacuum Society
Format: Serial
Language:English
Published: New York : American Institute of Physics for the American Vacuum Society.
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!
Holding Statement:Vol. 1-8, 1983-90