Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Theodore M. Besmann, Bernard M. Gallois..
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
1990
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| Series: | Materials Research Society symposium proceedings ;
v.168 |
| Subjects: | |
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