Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.

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Bibliographic Details
Main Author: Metev, Simeon M. (Simeon Metodiev)
Other Authors: Veiko, Vadim P. (Vadim Pavlovich)
Format: Book
Language:English
Published: Berlin ; London : Springer, c1994
Subjects:
Lasers > Industrial applications
Assembly-line methods
Thin film devices
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