Materials science and technology : a comprehensive treatment / edited by R.W.Cahn, P. Haasen, E.J. Kramer Vol.16, Processing of semiconductors ; volume editor: Kenneth A. Jackson.
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| Other Authors: | , , , |
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| Format: | Book |
| Language: | English |
| Published: |
Weinheim ; Chichester :
Wiley-VCH,
1997
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| Subjects: | |
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