Copper-fundamental mechanisms for microelectronic applications / Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann.

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Bibliographic Details
Main Author: Murarka, Shyam P.
Other Authors: Verner, Igor V., 1955-, Gutmann, Ronald J.
Format: Book
Language:English
Published: New York ; London : John Wiley, 2000
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