Microsensors, MEMS and smart devices / Julian W. Gardner, Vijay K. Varadan and Osama O. Awadelkarim.

This text reports on developments in both the integration of a microsensor and its microelectronic circuitry to produce a smart sensor and the integration of a microsensor, a microactuator and their microelectronic circuitry to produce a microsystem.

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Bibliographic Details
Main Author: Gardner, Julian W., 1958-
Other Authors: Varadan, V. K, 1943-, Awadelkarim, Osama O.
Format: Book
Language:English
Published: New York ; Chichester : Wiley, 2001.
Subjects:
Microelectromechanical systems
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Pilkington Library

Availability details from Pilkington Library
Shelfmark: 620.0045/GAR
Copy number Shelving location Availability
Copy [0402474589] Unknown On Shelf

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