Microsensors, MEMS and smart devices / Julian W. Gardner, Vijay K. Varadan and Osama O. Awadelkarim.
This text reports on developments in both the integration of a microsensor and its microelectronic circuitry to produce a smart sensor and the integration of a microsensor, a microactuator and their microelectronic circuitry to produce a microsystem.
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| Format: | Book |
| Language: | English |
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New York ; Chichester :
Wiley,
2001.
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