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Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink.
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| Format: | Book |
| Language: | English |
| Published: |
Berlin ; London :
Springer,
c2001
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| Series: | Microtechnology and MEMS
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Pilkington Library
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Shelfmark:
621.313/ELW |
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Copy [0402324404]
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