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Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; London :
Springer,
c2001
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| Series: | Microtechnology and MEMS
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| Subjects: | |
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| Physical Description: | x, 295 p. : ill. ; 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 3540675825 |