Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.

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Bibliographic Details
Main Author: Madou, Marc J.
Format: Book
Language:English
Published: Boca Raton, FL : CRC Press, 2001.
Edition:2nd ed.
Subjects:
Microelectronics
Integrated circuits > Design and construction
Microelectromechanical systems > Design and construction
Machining
Microelectronic packaging
Lasers > Industrial applications
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