APA (7th ed.) Citation

Madou, M. J. (2001). Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou: The science of miniaturization (2nd ed.). CRC Press.

Chicago Style (17th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication : The Science of Miniaturization / Marc J. Madou: The Science of Miniaturization. 2nd ed. Boca Raton, FL: CRC Press, 2001.

MLA (9th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication : The Science of Miniaturization / Marc J. Madou: The Science of Miniaturization. 2nd ed. CRC Press, 2001.

Warning: These citations may not always be 100% accurate.